| 摘要 |
<p>PROBLEM TO BE SOLVED: To stably provide a desired electronic spot by covering a desired range with a resist pattern, fitting an organic film to the other surface, forming a carbonate by electrodeposition on a base metal surface portion after the resist pattern is removed, thermally decomposing it to obtain an oxide, and burning and vanishing the organic film. SOLUTION: A base metal 2 is spin-coated with a negative type photoresist 7, and it is exposed with a photo-mask and developed to form a resin pattern. A binder of nitrocellulose or the like is applied on the whole surface of the base metal 2 and dried. The resist pattern is removed by a stripper, and only an organic film 9 is left. A desired pattern for an electron emission section is exposed on the surface of the base metal 2, and a mixture of mixed carbonate powder made of an eutectic of (Ba, Ca, Sr) CO3 and nitrocellulose is formed by electrodeposition. It is heated to about 90 deg.C in vacuum to obtain a decomposed oxide layer 1, and the organic film 9 is removed.</p> |
