| 摘要 |
PROBLEM TO BE SOLVED: To easily and perfectly remove a residual tracer gas in a leak standard by providing a means for supplying a cleaning gas to the leak standard and discharging it from the leak standard. SOLUTION: This device comprises valves 13, 14 connected to a piping between a valve 10 and a leak standard 11 and a cleaning gas cylinder 19 connected to the valve 13. According to this structure, since the process of draining a residual tracer gas after the calibrating operation of the leak inspection device can be separated and performed simultaneously with the other process, the calibrating operation can be performed in a short time, and the residual tracer gas can be drained for a long time. Therefore, the tracer gas can be perfectly drained. Even if the valve 10 is lightly leaked, the primary side of the valve 10 is kept at the concentration of the extremely trace tracer gas with a low pressure, so that the influence on the inspection can be minimized even if the airtightness of the valve 10 is lost.
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