| 摘要 |
PROBLEM TO BE SOLVED: To highly precisely adjust a frequency by forming a polymer film on a surface wave substrate and adjusting the film of the polymer film. SOLUTION: A polymer film 6 is formed on a surface wave substrate 2, the film thickness of the polymer film 6 is adjusted and therefore a frequency is adjusted. An end face reflection-type surface wave resonator 1 is constituted by using a rectangular surface wave substrate 2. The relative dielectric constantεS/εO of the surface wave substrate 2 is necessary to be not less than 30 and an electric/mechanical connection coefficient K to be not less than 20%. For adjusting the frequency of the end face reflection-type surface wave resonator 1, the polymer film (polyimide film) 6 is formed on the surface wave substrate 2. Namely, a resonance frequency is adjusted by adjusting the thickness of the polyimide film 6. It is desirable that the relative dielectric constant of the polymer film 6 is smaller than that of the surface wave substrate 2, the polyimide film is suitably used but the film formed of the polymer of polyamide can be formed.
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