| 摘要 |
PROBLEM TO BE SOLVED: To improve a gas supply part made of quartz for use in a normal pressure furnace and stop damages of the normal pressure furnace to a minimum, with respect shocks such as an earthquake, etc. SOLUTION: A gas supply pipe 25, made of quartz for supplying a reaction gas, is connected to a reaction pipe 4 made of quartz constituting a furnace body. There is formed, in this gas supply pipe 25, a stress gathering part 23 gathering a stress by priority to the other parts, when tremor occurs in the furnace body. The stress gathering part 23 is provided at a side of a gas supply pipe 8 at a side of a supply source, in the front of a piping clamp 21 which connects a gas supply pipe 7 at a side of a reaction pipe fitted on the reaction pipe 4 with the gas supply pipe 8 at the side of the supply source. As the stress gathering part 23, the simplest V groove may be formed in a circumferential direction.
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