| 摘要 |
An outer wall temperature of an enclosure containing a heat source, such as a coil array of a linear or planar motor, e.g. for driving a photolithography wafer positioning stage, is controlled by an insulating coolant flow in an intermediate channel. Laminar flow provides a thermal boundary layer having a thickness smaller than the channel height, which minimizes heat transfer, thereby effectively "insulating" the outer wall from the heat source. Excess heat is removed by turbulent coolant flow in a second channel. The two channels can be connected in series. Variations provide cooling of two-sided heat sources. To support the outer wall, posts extend through openings in the channel walls and are attached to a base plate. An insulating barrier surrounds each post in the turbulent flow channel, thereby minimizing heat transfer to the posts. To minimize turbulence in the insulating flow channel, the post has an airfoil shape.
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