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发明名称
LCD FABRICATION METHOD AND CLEANING METHOD FOR SUBSTRATE
摘要
申请公布号
KR100261945(B1)
申请公布日期
2000.07.15
申请号
KR19980023563
申请日期
1998.06.17
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
NAGAHARA, YOSIYOUKI;HAYAMIGU, NAOHYA;SAKURAI, NOYHAKI;OHKOSI, NORIKO;NONAKA, DOSITAKA;HURUYA, HIROAKI
分类号
H01L21/306;(IPC1-7):G02F1/13
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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