发明名称 |
Micro contact pin structure with a piezoelectric element and probe card using the same |
摘要 |
A micro contact structure and a probe card to be used in testing performance of a semiconductor integrated circuit device formed on a semiconductor wafer have improved contact characteristics. The contact structure includes a micro contact pin having electric conductivity formed on one end of a beam which is movable in a vertical direction, and a piezoelectric element formed on the beam to drive the beam in the vertical direction. The beam is made of silicon on the surface of which is formed of a conductive thin film, and the micro contact pin has a pyramid shape. The piezoelectric element is a bimorph plate mounted on an upper surface of the beam or both upper and lower surfaces of the beam.
|
申请公布号 |
US6072190(A) |
申请公布日期 |
2000.06.06 |
申请号 |
US19960751851 |
申请日期 |
1996.11.18 |
申请人 |
ADVANTEST CORP. |
发明人 |
WATANABE, TAKASHI;YOSHIDA, MINAKO |
分类号 |
G01R31/26;B81B3/00;G01R1/067;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):H01L23/58;H01L29/82;H01L23/48;H01L23/52 |
主分类号 |
G01R31/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|