| 摘要 |
PROBLEM TO BE SOLVED: To reduce a leakage current from a heater part and to reduce the change in concentration measurement accuracy due to temperature by arranging an electrical heating element on a surface that faces a body part of a heater substrate at a heater part and a high-voltage side lead part on the opposite surface. SOLUTION: In a body part 10 of a gas sensor element 1, a pump cell 3 consisting of pump electrodes 31 and 32 is provided at a solid electrolyte body 11, and the pump electrode 32 faces a gas chamber to be measured that is surrounded by solid electrolytes 11-13. With a porous body that is filled into the space part, the gas to be measured is introduced into a gas chamber to be measured under a diffusion resistor and is diffused to an area close to a measurement electrode 21 of a detection cell 2 that is provided at the solid electrolyte 13. Also, the pump cell 3 pumps an oxygen ion between the gas chamber to be measured and a reference gas chamber 103 by applying power. In this case, in a heater part 5 that is laminated to the solid electrolyte body 13 via an insulation substrate 14, an electrical heating element 50 and a high- voltage-side lead part 551 are provided on a face that opposes the body part 10 of a heater substrate 51 and on the opposite surface, respectively, thus improving the insulation property with the detection cell 2 and suppressing a leakage current. |
