发明名称 PRODUCTION OF COLOR FILTER FOR SOLID IMAGE PICKUP ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To make it possible to drastically shorten the time for development and to improve the workability of development work by carrying out the development work while maintaining a developer in a specific temperature range. SOLUTION: The development processing is executed while the developer is maintained at a liquid temperature exceeding 30 deg.C and below 35 deg.C at the time of the development in the process for producing a color filter for a solid image pickup element by subjecting a colored lens (color resist) film of a pigment dispersion type having photosensitivity to exposure and development. As a result, the developability of the color resist film can be improved and the development speed can be increased while existing devices are used. Piping which is composed of a double piping structure by inserting inner piping 2 into outer piping 1 in which a warmed temperature medium, such as pure water, blows and passes the developer into the inner piping 2 is used at the method for regulating the liquid temperature to be exceeding 30 deg.C and below 35 deg.C. The inner piping 2 of the outer piping 1 and the inner piping 2, which comes at least directly into contact with the developer, is formed of a material having chemical resistance to the developer, for example, a fluororesin.</p>
申请公布号 JP2000122306(A) 申请公布日期 2000.04.28
申请号 JP19980290157 申请日期 1998.10.13
申请人 SONY CORP 发明人 MATSUZAKI KOJI
分类号 H04N9/07;G02B5/20;G03F7/30;H01L27/14;(IPC1-7):G03F7/30 主分类号 H04N9/07
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