发明名称 OZONE TREATMENT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide an ozone treatment system capable of rapidly and precisely judging whether a resistance fuse is fused or not without special experience and free from the fear of the sudden stoppage of the system. SOLUTION: In an ozone treatment system provided with a gaseous starting material supply device 1, an ozonizer 2 generating an ozonized gas from the gaseous starting material supplied from the gaseous starting material supply device 1 and a power source device 10 supplying power to the ozonizer and having a discharge tube provided in the ozonizer 2 through the resistance fuse 6, a thermolabel, which is discolored before the resistance fuse is fused, is pasted on the resistance fuse, a camera 13 for photographing the thermolabel is mounted outside of a visual inspection window of the ozonizer, an image treating device 14 for detecting and discriminating the discoloration of the thermolabel from the camera and an output device for alarming or displaying by the signal from the image treating device 14 are provided.
申请公布号 JP2000109303(A) 申请公布日期 2000.04.18
申请号 JP19980285446 申请日期 1998.10.07
申请人 HITACHI LTD 发明人 GOTO TAKASHI;KOMATSU NAOTO;NAKAZAWA MASAMITSU;OKADA AKIHIKO
分类号 C02F1/50;B01J19/08;C01B13/11;C02F1/78;H01L21/31;(IPC1-7):C01B13/11 主分类号 C02F1/50
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