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发明名称
Method for forming a trench on a semiconductor device
摘要
申请公布号
GB0000562(D0)
申请公布日期
2000.03.01
申请号
GB20000000562
申请日期
2000.01.11
申请人
NEC CORPORATION
发明人
分类号
H01L21/76;H01L21/265;H01L21/334;H01L21/762
主分类号
H01L21/76
代理机构
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