| 摘要 |
PROBLEM TO BE SOLVED: To prevent an undesirable component from penetrating into an exposure work by a method wherein an undesirable gas component, is removed from gas that is introduced into an exposure chamber and the residual gas is dehumidified and sent to a blowing pump, and the gas is provided through the blowing pump as gas used in an air conditioner. SOLUTION: Instead of that gas exhausted from an exposure chamber 6 through an exhaust means 12 is sent direct to a blowing pump 14 in a usual exposure system, gas is sent as shown by an arrow 21 to an undesirable component removing means 15 which removes an undesirable component from gas so as not to make the gas generate a component that is undesirable for an exposure work when gas is irradiated with exposure light, then sent to a dehumidifying means as shown by an arrow 23 and a blowing pump 14 as shown by an arrow 24, and then supplied to an air conditioner 11 as operating gas as shown by an arrow 22.
|
