| 摘要 |
PROBLEM TO BE SOLVED: To properly execute exposure and to observe a part to be inspected at a proper angle by changing-over the usage range of an exposure control X-ray sensor in accordance with the change-over of the usage range of a detecting element in a plane detecting equipment. SOLUTION: An operator 100 inputs which part of matrix in the plane detecting equipment 4 is used for X-ray detecting to a system controller 9 in accordance with an inspection purpose. Then, the driving of the equipment 4 is changed-over through a control circuit 7. Besides, a part in an exposure control sensor array 3 to be used for X-ray detection is also changed-over. When the operator 100 indicates an X-ray exposure to the system controller 9, an X-ray controller 8 indicates the electric charge clear of the equipment 4 to the control circuit 7. After clearing the electric charge, the control circuit 7 reports a preparation end to the X-ray controller 8. Then, the X-ray controller 8 operates an X-ray tube 1 and executes the X-ray exposure. With this configuration, an X-ray irradiation region is limited and also incidence is vertically executed with the part matrix as a center.
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