| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation sensitive resin compsn. having well-balanced characteristics such as sensitivity and resolution and obtaining a minute pattern having a rectangular cross-sectional shape by incorporating a specified compound, a quinonediazidosulfonic ester compd., etc. SOLUTION: The radiation sensitive resin compsn. contains an alkali-soluble resin obtd. by condensing a phenolic compd. represented by the formula, one or more other phenolic compds. and an aldehyde compd. and a quinonediazidosulfonic ester compd. In the formula, R1 is H or alkyl, R2 is alkyl, alkoxy or aryl and R3 and R4 are each H or alkyl but at least one of R3 and R4 is alkyl. The alkali-soluble resin is not particularly limited if it is obtd. by condensing the above compds. |
