Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications

摘要

A micro-electromechanical switch which comprises a flexible longitudinal beam disposed adjacent to first and second contact members which form a gap in, for example, a radio frequency transmission line to control the flow of the radio frequency signal. At least one actuating beam is attached to at least one end of the flexible longitudinal beam. Also an actuating member is disposed adjacent to the actuating beam so as to generate an electrostatic force therebetween upon the application of a voltage across the actuating beam and the actuating member. When the voltage is applied, the actuating beam bends and thus applies a longitudinal force and torque on the joint between the actuating beam and the flexible longitudinal beam. This longitudinal force and torque cause the flexible longitudinal beam to bend laterally toward the first and second contact members, thereby completing the electrical circuit attached to the first and second contact members. In this invention, a small movement in the actuating beam causes a large lateral bending of the longitudinal beam; allowing good electrical performance, high isolation and low insertion loss with a small actuating voltage.