| 摘要 |
PURPOSE:To execute two kinds of analyses for one point of a sample without switching the sample from one apparatus to another by providing a charging particle emitting system to illuminate the same point of the sample surface, and a light emitting system. CONSTITUTION:An analyzing point is determined by an image of the sample surface through an optical microscope or a scanning electron microscope. A sample moving device 23 is moved so as to bring the point on the optical axis of an electronic optical system. For this purpose, it is enough to set a branch point at the center of the visual field of the optical microscope or the screen of a CRT 22. In this state, electron beams are emitted to the sample surface from an electron gan 1. As an X-ray spectroscope is scanned and the output of an X-ray detector 5 is recorded, the X-ray spectral spectrum of the branch point is obtained. Thereafter, a light source 15 or 18 is differentially moved and an inclined mirror 11 is advanced. At the same time, a spectroscope 12 is scanned at the side of the longer wavelength than that of the cast light and the output of a photodetector 13 is recorded. Accordingly, the fluorescent spectrum of the branch point of the sample is recorded. |
