| 摘要 |
PROBLEM TO BE SOLVED: To set the temperature of a substrate at a specified level without detecting temperature correlation. SOLUTION: A wafer processor comprises a susceptor 11 for holding a wafer W, a heater 12 for heating a wafer W mounted on the susceptor 11, thermocouples 15(1), 15(2) for detecting the temperature of the susceptor 11, a temperature controller 16 for controlling the heating temperature of the heater 12 based on the temperature detection outputs from the thermocouples 15(1), 15(2) and a thyristor unit 17.
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