INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM

摘要

PURPOSE: The instrument and mounting equipment used in clean room are provided to control the generation of organic component which has a bad influence upon making of circuit pattern. CONSTITUTION: The mounting equipment is used for handling substrates in a clean room maintained at a room temperature under the atmospheric pressure. The absorbable organic component in substrates is reduced by additive which composes a lubricant, plasticizer, an antioxidant and antistatic agent, including low volatile. An additive does not generate gaseous organic component under the conditions of a room temperature and the atmospheric pressure.