| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer holder capable of always fixing a wafer in a constant state irrespective of waviness or warpage of the wafer. SOLUTION: A mounting surface 2a for a wafer 1 in this holder 2 is formed into a spherical shape projecting inside an elastically deformable range of the wafer 1 so as to allow the wafer 1 to be mounted thereon. A plurality of coaxial grooves 2b and grooves 2b crossing the coaxial grooves 2b are formed at the surface 2a of the holder 2. Pressing pins 3 are tapered at the circumferential surfaces thereof, and are detachably attached to the holder 2, thus constituting the structure for pressing the peripheral edge of the wafer 1.</p> |
