| 摘要 |
PROBLEM TO BE SOLVED: To improve the cleanliness of a supporting body for transportation and to enhance quality by introducing gas through a perforated plate, thereby minimizing the splashing of the foreign matter in a chamber at the time of treating the optical recording medium substrates mounted at the supporting body for transportation in a reduced pressure atmosphere and returning the reduced pressure atmosphere to an atm. pressure before or after the treatment. SOLUTION: The substrates 3 of the plural optical recording media are mounted at a rotatable and revolvable rotating and revolving mechanism 2 of a tray 1 and the tray 1 is transported to a preevacuating chamber and a degassing and drying chamber where the substrates 3 are subjected to preevacuating and vacuum drying. Gaseous nitrogen is blown out of a purging nozzle 16 into the preevacuating chamber and a take-out chamber to restore the atm. pressure in the chamber 15 at the time of carrying in and carrying out of the tray 1. The perforated plate 17 formed by boring a stainless steel plate with many holes is disposed right below the purging nozzle 16, i.e., in the gas introducing route to the chamber 15. As a result, the velocity of the flow of the discharging gas from the purging nozzle 16 is lowered and flow regulation is effectively executed. The cleaning of the tray 1 and the inside of the chamber 15 is thus made possible.
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