发明名称 Bandpass photon detector
摘要 Apparatus for bandpass photon detection containing a lens for collimating input light, a bandpass filter element, and a photomultiplier detector. Light passes from a source into the lens which collimates the light which then is incident upon the filter. The filter is tuned to a particular band of wavelengths, such that out of all of the wavelengths that are incident upon the front side of the filter, a wavelength band is propagated through the filter and passes from the filter to the photomultiplier detector, such that the output of the photomultiplier detector is a voltage level representing the energy content within that wavelength band. In various alternative embodiments, the bandpass photon detectors are arranged in a number of cascade arrangements such that multiple wavelength bands are simultaneously detected.
申请公布号 US5995235(A) 申请公布日期 1999.11.30
申请号 US19970800003 申请日期 1997.02.13
申请人 APPLIED MATERIALS, INC. 发明人 SUI, ZHIFENG;LUSCHER, PAUL E.
分类号 G01J3/443;G01J1/04;G01J1/42;G01N21/25;G01N21/71;G02B6/34;H01L31/12;H05H1/00;(IPC1-7):G01J3/51 主分类号 G01J3/443
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