发明名称 |
Substrate transfer and bath apparatus |
摘要 |
The substrate processing apparatus comprises at least one chemical liquid bath for processing the substrate with a chemical liquid, and a multi-function processing bath for performing at least two of chemical liquid processing, cleaning with water and drying on the substrate which is processed with a chemical liquid within the chemical liquid bath.
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申请公布号 |
US5976198(A) |
申请公布日期 |
1999.11.02 |
申请号 |
US19960659687 |
申请日期 |
1996.06.06 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
SUHARA, TADAHIRO;SUGIMOTO, KENJI |
分类号 |
H01L21/00;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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