| 摘要 |
PROBLEM TO BE SOLVED: To reduce the dispersion of a heater resistance value by forming a heater pattern on the surface on the transporting tape side of a green sheet in the manufacturing process of a ceramic heater, wherein the green sheet is formed on the transporting tape by means of a doctor blade method and the heater pattern is printing on the green sheet and baked. SOLUTION: When a first green sheet 13 is formed, a heater pattern 15 having a thickness of 25μm is formed by performing paste printing on a surface (restraining surface) 13a that was on the transporting tape side by the use of tungsten paste. A heater pattern 15 composed of a heat generating pattern 16, a positive electrode side terminal pattern 17a, a negative electrode side terminal pattern 17b and lead patterns 18a, 18b is printed in the form of a thick film by having the restraining surface 13a face upward. The surface roughnesses of the restraining surface 13a and the other surface (free surface) are about 0.6-1.5μm and 4.1-5.4μm, respectively. Since the heater pattern is formed on the surface having the smaller surface roughness, a printed thickness which is close to a target value can be provided.
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