Mikrosensor mit einer Resonatorstruktur

摘要

The invention relates to a microsensor with a resonator structure, which is brought to oscillation by first electrical signals and emits second electrical signals in accordance with the quantity to be measured. For thermally stimulating the production of oscillations on the resonator structure a heating element is arranged on said structure to which at least one of the first electrical signals is transmitted. For the thermal stimulation of lateral oscillations in a microsensor having a resonator structure the invention provides for the microsensor at the foot of at least one oscillating part of the resonator structure to have at least two areas which are thermally separated from each other by an area of reduced thermal conductivity and for the heating element to be positioned on one of these areas. Because of this arrangement the resonator structure can be stimulated to produce lateral oscillations when the heating element is supplied with corresponding current pulses. In an advantageous version a pick-up element for detecting the amplitude of oscillation is positioned in at least one of the other areas.