| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polymer and a photosensitive corrosion resistant film compsn. capable of forming an image at a short wavelength, in particular 193 nm by incorporating a photoactive component and a resin bonding component contg. a specified polymer. SOLUTION: A photoactive component and a resin binder contg. a polymer having cyano-contg. photosensitive acid-labile units are incorporated. The polymer generally has one or more cyano-contg. repeating units. Preferably any phenyl or other arom. group is not substantially contained in the polymer. The pref. polymer has about <0.1 mol%, <0.02 mol%, <0.04 mol%, <0.08 mol%, or in particular about 0.01 mol% arom. group content. The particularly preferred polymer does not perfectly contain any arom. group. The polymer may contain other units that contribute selectively to the water developability of a photosensitive corrosion resistant film. |
