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发明名称
DETECTION DEVICE FOR WAFER IN CASSETTE
摘要
申请公布号
JPH11255306(A)
申请公布日期
1999.09.21
申请号
JP19980062671
申请日期
1998.03.13
申请人
HITACHI LTD
发明人
SATO MASAMI;SATO SEISHIRO
分类号
B65G1/00;B65G49/07;(IPC1-7):B65G1/00
主分类号
B65G1/00
代理机构
代理人
主权项
地址
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