发明名称 |
Multi-target manipulator for pulsed laser deposition apparatus |
摘要 |
Disclosed is a multi-target manipulator for a pulsed laser deposition apparatus. The multi-target manipulator for a pulsed laser deposition apparatus grows a thin film having both a high quality and a repeatability, automatizes a deposition apparatus, and economically performs a pulsed laser deposition, when a thin film is grown by using a pulsed laser deposition apparatus. The multi-target manipulator for a pulsed laser deposition apparatus includes: a driving power providing member which includes a stepping motor and a motion feedthrough thereby providing a rotation driving power to the target disk driving shaft and the target driving motor shaft; a driving power transmission and head supporting member, thereby transmitting a rotation driving power necessary for rotating both the target disk provided from the driving power providing member and the target and supporting the head of the target manipulator; and a head portion, thereby performing rotations of the target disk and the target so as to locate a target material on the focal point of the laser beam.
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申请公布号 |
US5942040(A) |
申请公布日期 |
1999.08.24 |
申请号 |
US19970919006 |
申请日期 |
1997.08.27 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KIM, JE-HA;HAN, SEOK-KIL;KANG, KWANG-YONG |
分类号 |
C23C14/28;(IPC1-7):C23C14/00 |
主分类号 |
C23C14/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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