PLANGE FOR CHAMBER OF CVD APPARATUS,申请号KR19960016158U-传众专利搜索

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发明名称	PLANGE FOR CHAMBER OF CVD APPARATUS
摘要
申请公布号	KR200153150(Y1)	申请公布日期	1999.08.02
申请号	KR19960016158U	申请日期	1996.06.17
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	LEE, NAM-JIN;YOO, SEA-YOUNG;CHOI, SANG-KOOK
分类号	H01L21/203;(IPC1-7):H01L21/203	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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