发明名称 |
Gettering enclosure for a semiconductor device |
摘要 |
Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber.
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申请公布号 |
US5929515(A) |
申请公布日期 |
1999.07.27 |
申请号 |
US19970941823 |
申请日期 |
1997.10.01 |
申请人 |
THE CHARLES STARK DRAPER LABORATORY, INC. |
发明人 |
GREIFF, PAUL;BREZINSKI, PAUL |
分类号 |
H01L23/26;(IPC1-7):H01L23/20 |
主分类号 |
H01L23/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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