发明名称 Gettering enclosure for a semiconductor device
摘要 Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber.
申请公布号 US5929515(A) 申请公布日期 1999.07.27
申请号 US19970941823 申请日期 1997.10.01
申请人 THE CHARLES STARK DRAPER LABORATORY, INC. 发明人 GREIFF, PAUL;BREZINSKI, PAUL
分类号 H01L23/26;(IPC1-7):H01L23/20 主分类号 H01L23/26
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