| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method for manufacturing a valve for ink jet head by CVD in which highly accurate alignment of valve can be ensured through use of photolithographic process while facilitating thickness control of valve and simplifying the process. SOLUTION: Metal CVD is applied to the manufacture of a valve for ink jet head. The valve is preferably made of Ta, W, Pt, Mo, Cr, Mn, Fe, Co, Ni, Cu, or the like. More specifically, a part of a first mask layer for forming a base part is etched and a base part is formed by metal CVD followed by formation of a conductive layer on the base part and the first mask layer. Subsequently, a second mask layer is formed on the conductive layer, a part of the second mask layer for forming a movable member is etched, a movable member is formed on the conductive layer by metal CVD and then the first and second mask layers are removed. |
