Pressure flow and concentration control of oxygen/ozone gas mixtures

摘要

A system for controlling pressure flow and concentration Of O3/O2 positions a thermal MFC upstream from an ozone generator to avoid the adverse effects of ozone on the thermal MFC. A flow restrictor diverts a precise amount of flow to an ozone monitor so that the flow to a CVD chamber is precisely controlled. In other embodiments a full-flow ozone monitor and non-thermal MFC are utilized.