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发明名称
SEMICONDUCTOR FABRICATING APPARATUS
摘要
申请公布号
KR0179837(B1)
申请公布日期
1999.04.15
申请号
KR19950026120
申请日期
1995.08.23
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
JUNG, TAE-SUNG
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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