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发明名称
Interferometrische Meßvorrichtung
摘要
申请公布号
DE19721883(C2)
申请公布日期
1999.04.15
申请号
DE19971021883
申请日期
1997.05.26
申请人
ROBERT BOSCH GMBH, 70469 STUTTGART, DE
发明人
DRABAREK, PAWEL, 75233 TIEFENBRONN, DE
分类号
G01B11/24;G01J9/02;(IPC1-7):G01B9/02
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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