Poly-aluminium exchange for aluminium fill of high aspect,申请号SG19970004394-传众专利搜索

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发明名称	Poly-aluminium exchange for aluminium fill of high aspect
摘要
申请公布号	SG63784(A1)	申请公布日期	1999.03.30
申请号	SG19970004394	申请日期	1997.12.10
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	HAKEY, MARK, C.;HORAK, DAVID, V.;LUCE, STEPHEN, E.;MCDEVITT, THOMAS, L.;NOBLE, WANDELL, P.
分类号	H01L21/18;H01L21/22;H01L23/48;(IPC1-7):H01L21/18	主分类号	H01L21/18
代理机构		代理人
主权项
地址

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