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发明名称
CATADIOPTRIC REDUCTION OPTICAL SYSTEM
摘要
申请公布号
JPH1184248(A)
申请公布日期
1999.03.26
申请号
JP19970267941
申请日期
1997.09.12
申请人
NIKON CORP
发明人
OMURA YASUHIRO
分类号
G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/08
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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