CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM EXPOSURE DEVICE AND SCANNING ELECTRON MICROSCOPE,申请号JP19970048155-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM EXPOSURE DEVICE AND SCANNING ELECTRON MICROSCOPE
摘要
申请公布号	JPH10247469(A)	申请公布日期	1998.09.14
申请号	JP19970048155	申请日期	1997.03.03
申请人	NIKON CORP	发明人	SHIMIZU HIROYASU
分类号	G21K5/04;G03F7/20;H01J37/244;H01J37/28;H01J37/305;H01L21/027;(IPC1-7):H01J37/244	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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