METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT,申请号JP19970061913-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号	JPH10242398(A)	申请公布日期	1998.09.11
申请号	JP19970061913	申请日期	1997.02.28
申请人	SANYO ELECTRIC CO LTD	发明人	AOYAMA MASASHIGE
分类号	H01L27/04;H01L21/822;H01L21/8234;H01L27/06;(IPC1-7):H01L27/04;H01L21/823	主分类号	H01L27/04
代理机构		代理人
主权项
地址

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