| 摘要 |
An analysing method of process defects is provided to automatically analyze. The analysing method comprises the steps of: classifying into dot defects group, scratch defects group, diffusion defects group, high density line defects group and chemical pollution defects group in accordance with size and position of defects; and automatic analysing the process defects by inputting the conditions of defects into computer. Thereby, it is possible to increase throughput and yield by automatic classifying the process defects.
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