| 摘要 |
PROBLEM TO BE SOLVED: To increase pressure of a film generated in a slide surface and improve load power, bearing rigidity, or the like in the slide surface. SOLUTION: A rotary ring 1 engraved with a spiral groove Z in a slide surface and a seal ring 2 engraving a circumferential groove 3 introducing gas in the periphery through a communication hole 4 supplied to the spiral groove Z in the slide surface are mutually slid, a gas seal is performed in a dry gas seal, a spiral angleαof the spiral groove Z engraved in the slide surface of the rotary ring 1 in the dry gas seal is formed large in an internal peripheral side and small in a peripheral side, a groove width is formed to be substantially fixed, or large in an inner circumferential side and small in an outer peripheral side.
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