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发明名称	SUBSTRATE TREATMENT DEVICE
摘要
申请公布号	JPH09199458(A)	申请公布日期	1997.07.31
申请号	JP19960028486	申请日期	1996.01.22
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	KIZAKI KOJI
分类号	B08B3/02;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B3/02
代理机构		代理人
主权项
地址

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