| 摘要 |
<p>PROBLEM TO BE SOLVED: To attempt to enlarge the air current flowing to a place which needs clean air by forming a hole at the bottom center of a housing cap provided at a particle filter of high efficiency, and providing an air current control means for controlling the air current direction at a shaft which penetrates the hole. SOLUTION: The air current controller comprises four foldable blades W (W1 to W4), and a square plate T as a rectangular plate and a shaft 41, and is entirely formed in a bevel shape. The end 41a of the shaft 41 is turned by using a tool such as a screwdriver to make it possible to enlarge or fold the blades W, and when the blades W1 to W4 are simultaneously enlarged to a predetermined angle, the air current flowing above the controller is widely diffused. The controller is used by interposing it between the particle filter of high efficiency provided in a clean room used for semiconductor manufacturing step and a filter housing.</p> |
