| 摘要 |
PROBLEM TO BE SOLVED: To easily and highly reliably carry samples in a vacuum processing system for semiconductor devices, liquid crystals, etc., for which size reduction is hastened. SOLUTION: In a vacuum device in which each vacuum chamber 2 is constituted by placing two discs 3 at a certain interval in a cylinder, cylinders 17 having the same inside diameter are fitted to one processing chamber 9 in a facing state and a shaft 21 is passed through the cylinders 17. Vacuum chambers 2 which contain solid lubricants 19 and have the same length in the length direction are intermittently fed on the shaft 2 so that the centers of samples 1 in the vacuum chambers 2 can come to the center of the electrode 11, etc., of each processing chamber 9. While the chambers 2 are fed, the samples 1 are continuously processed. |
