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发明名称
MIRROR FOR MEASURING INTERFERENCE
摘要
申请公布号
JPH09101108(A)
申请公布日期
1997.04.15
申请号
JP19950256158
申请日期
1995.10.03
申请人
NIKON CORP
发明人
ICHIKAWA HAJIME;YAMAMOTO TAKAHIRO
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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