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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPH0982690(A)
申请公布日期
1997.03.28
申请号
JP19950241267
申请日期
1995.09.20
申请人
HITACHI LTD
发明人
NAWATA MAKOTO;YAKUSHIJI MAMORU;TSUKUNI KAZUYUKI;YAMAZAKI KAZUO
分类号
H05H1/46;C23F4/00;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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