| 摘要 |
A method for producing a ceramic member having fine throughholes, includes the steps of: producing a first green sheet for a thin ceramic plate; forming a plurality of fine throughholes having a minimum diameter of 150 mu m or less after firing in the first green sheet and having a minimum distance of 150 mu m or less between two of the throughholes after firing, the throughholes being disposed zigzag; producing a second green sheet to be used for a ceramic substrate; forming at least one window portion in the second green sheet; laminating the first green sheet on the second green sheet for obtaining a unitary laminate so that the plurality of fine throughholes in the first green sheet match the window portion(s) of the second green sheet; and firing the laminate so as to obtain a unitary sintered body; wherein a shorter side (maximum width) W of the window portion of the ceramic substrate satisfies the formula: W(mm)>/=0.01/d, wherein d is the minimum distance between two of the throughholes after firing. Alternatively, the throughholes can be formed in the first green sheet after it is laminated with the second green sheet. |
