NONDESTRUCTIVE INSPECTION EQUIPMENT

摘要

A nondestructive inspection equipment with increased space resolving power by shortening the distance between a superconducting detector and an object inspected. An inspection space is formed in vacuum between an inner vessel and an outer vessel of a cryostat, and a stage for scanning an objet to be inspected is formed. The inspection is carried out by evacuating the inspection space with a vacuum pump, transferring refrigerant to the inner vessel, and setting the object inspected near the inner vessel.