| 摘要 |
PROBLEM TO BE SOLVED: To prevent crushing at the time of quenching and to suppress warpage sufficiently and prevent the generation of cracks by making the carrier concentration of a transparent conductive film a value within a specific range, and performing the reinforcing treatment of a glass substrate by quenching after heat treatment at a temperature value within a specific range. SOLUTION: An alkaline barrier layer 2 is formed on a base glass board 1 made of soda lime silicate glass, etc., and transparent conductive film 3 is laminated on it. Out of these a glass substrate 4 for solar cells is made. On the transparent conductive film 3 of this glass substrate 4 an amorphous silicon element layer 5 made out of a three-layer a-Si of p-type, i-type, and n-type is laminated, and on it an aluminum electrode layer 6 is formed. And crushing at the time of queching in the reinforcing treatment is us prevented by making the carrier concentration of the transparent conductive film 3 more than 1×10<20> /cm<3> and less than 5×10<20> /cm<3> , and warpage of the glass substrate is suppressed and cracks are prevented by controlling the heating temperature of the glass to a value higher than 620 deg.C and lower than 640 deg.C. |
