AUTOMATED CALIBRATION OF TEMPERATURE SENSORS IN RAPID THERMAL PROCESSING

摘要

An automatic calibration system (10) and method for calibration of a substrate temperature sensor (21) in a thermal processing system (20). The calibration system (10) includes a temperature probe (15) associated with the substrate temperature sensor (21) to be calibrated and an actuator (19) to position the temperature probe (15) relative to the substrate (97) during a calibration cycle. The actuator (19) and temperature probe (15) can be incorporated into the thermal processing system (20) in order to maintain the thermal processing system cleanliness and integrity during a calibration cycle, and to allow rapid automated calibration. In the preferred embodiment, the temperature probe (15) and the actuator (19) are implemented in the gas showerhead assembly (98) of a rapid thermal processing system (20).