SUBSTRATE CARRYING DEVICE

摘要

A substrate carrying device for positioning a substrate without putting any load on a carrying arm, which comprises a rotating shaft (12) rotatably and vertically movably mounted on a base table (11), an extensible carrying arm (14) rotatably supported on the rotating shaft (12), and a substrate receiver (16) mounted at a leading end of the carrying arm (14) for placement of a substrate (18) thereon. A guide base (20) is fixed to the rotating shaft (12), the guide base (20) being disposed below the substrate receiver (16) in such a manner as to become substantially parallel therewith, and a substrate alignment mechanism (21) is mounted on the rotating shaft (12) via the guide base (20). The substrate alignment mechanism (21) has a pair of position correcting members (24, 24) that are connected to air cylinders (22). When the position correcting members (24, 24) are displaced by driving the air cylinders (22, 22), the position correcting members (24, 24) correct the position of the substrate (18).