| 申请人 |
TOKYO ELECTRON LTD., TOKIO/TOKYO, JP;KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP |
发明人 |
NOZAWA, TOSHIHISA, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;ARAMI, JUNICHI, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;HORIOKA, KEIJI, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP;HASEGAWA, ISAHIRO, C/O INTELLECTUAL PROPERTY DIV., MINATO-KU, TOKYO 105, JP |
